
| Family | enAF 400kHz |
|---|---|
| Partnumber | EO-IM-APD167 |
| Sample Speed | 1200 mm/s |
| Max. Tracking Error | 6 µm |
| Min.DOF | ±9.0 µm |
| Magnification | 1.67 x |
| Focusing Range | 40 mm |
| PC Interface | Ethernet |
| Slope Condition | 20µm/50mm |
| Motion | Single Motion |
| Camera type | Line scan |
| Camera model | Linea HS 16k 400kHz |
| Lens model | APO Diamond 1.67x |